Open facility new registration

The devices managed by R&D Center for Innovative Material Characterization are now available as open facility devices.

・Ultra-High-Resolution Schottky Scanning Electron Microscope SU7000（Hitachi High-Technologies）

・Tabletop MicroscopesTM4000Plus （Hitachi High-Technologies）

・CD-SEM – Advanced CD Measurement SEM CS4800（Hitachi High-Technologies）

・JIB-4000 Focused Ion Beam Milling & Imaging System（JEOL）

Open facility device new registration SU7000
From July 1, it has become available as an open facility device (R&D Center for Innovative Material Characterization shared use equipment).

SU7000 is a high-performance, high-resolution scanning electron microscope.
An electron optics / detection system designed to simultaneously acquire multiple secondary electron signals and backscattered electron signals enables quick acquisition of a wide variety of signals from a wide-field entire image to a fine surface structure, and multi-channel signals, which can be displayed and saved at the same time. Furthermore, it is possible to operate in a low vacuum state, and it is possible to observe organic substances, biological samples, etc., which used to be difficult to observe with an electron microscope.
In addition, this equipment is equipped with EDX for composition analysis and EBSD equipment for structure analysis, which enables sophisticated analysis of materials.
It is expected that sharing this device will contribute to various researches including material characterization.