Toward innovative measurement and evaluation technologies
This center has been engaged in comprehensive research and development of new measurement techniques using optical wave, electron and particle beam. In addition, we have been challenging advanced technological issues for the fundamental technology of electron microscopy in semiconductor device measurement and structural analysis of new materials, and have realized high-resolution and high-precision measurement
technology.
In the future, we will develop measurement methods based on data science and pursue an approach that comprehensively integrates data